NEMS and Nanofabrication

The activity of the group is focused on researching novel technological solutions for future generations of semiconductor circuits with a multidimensional approach. It mainly explores two challenges: - Low-power, CMOS-like alternative devices. - Semiconductor based quantum technologies. The current research focuses on device integration (single-electron transistors and stacked transistors), 2D materials (graphene), state-of-the-art nanopatterning, including block copolymer-based nanolithography and vapor-phase infiltration to improve the performance of lithographic resists, as well as electrical characterization to drive the development of future nanoelectronic and quantum devices. The activity also includes advanced physical characterization methods using AFM, S(T)EM and FIB. The group participates in the Interdisciplinary Thematic Platform on Quantum Technologies of CSIC (QTEP).