NEMS and Nanofabrication

The group activity focuses on research on nanomechanical and nanoelectronic structures and their application to devices used in miniaturized integrated systems. It works specifically in nanofabrication technologies, nanoelectronic devices and their applications as electronic circuit elements and sensors, advanced methods of characterization at nanoscale and the study of the functional properties of nanostructures. The activities are on the frontier between nanotechnology and micro-nanoelectronics, which are two of the Key Enabling Technologies (KET) and it can be framed in the lower side of Technology Readiness Levels (TRL) from 1 to 3. The research on devices corresponds to the thematic areas of "More than Moore" and "Beyond CMOS" while the activity in nanofabrication is also included within the topic "More Moore", being performed mostly in the context of European consortia with high industrial participation.