Micro- and NanoTools

The main research line of the group is focused on the development of novel Micro- and Nano Tools (MEMS / NEMS). Our activities are divided into three sub-lines. In the technological research sub-line, we will explore new fabrication technologies and processes, mainly based on silicon. The compatibility between micromachining techniques and nanotechnologies will be our main challenge. In the research sub-line focused on the design and modeling, we aim to obtain innovative devices. The simulations will be based on macroscopic physical models and they will be extrapolated to micro- and nanoscale models. Finally in the experimental-characterization research sub-line, we will evaluate the devices-performance and the results will be compared with the simulated models. Thus for the period 2014-2017 we will focus on two lines: chips as sensors or actuators inside or on the outer membrane of living cells and piezoelectric materials for power generation.