Optical interferometry

Benefit description

Optical profilometer that provides 3D images of surface topography using the interferometry working principle. The equipment, a Filmetrics Profilm3D, builds maps ranging from the millimeter to the nanometer scale with lateral resolution limited by the diffraction limit, and sub-nanometer vertical resolution with piezoelectric positioning with a 500 µm scan range. The dimensions of the XY-stage are 100 mm x 100 mm. The maximum height is 100 mm. It has three operating modes: White Light Interferometry (WLI), Green Light Interferometry (GLI), and Phase Shift Imaging (PSI). It features two interferometric lenses, 10x and 50x, with numerical apertures of 0.3 and 0.55, respectively. The camera has a resolution of 2592 x 1944 pixels (5MP). The software allows "stitching" mode.