Instituto
INSTITUTO DE MICROELECTRONICA DE BARCELONA

THIN FILM BULK ACOUSTIC WAVE RESONATOR AND METHOD FOR PERFORMING HETEROGENEOUS INTEGRATION OF THE SAME WITH COMPLEMENTARYMETALOXIDESEMICONDUCTOR INTEGRATED CIRCUIT


Investigadores

JAUME ESTEVE TINTO
ENRIC CABRUJA CASAS
JOSE MONTSERRAT MARTI
LLUIS ANTONI TERES TERES