Diagnosis of luminescent plasmas

Benefit description

Diagnostics of plasmas generated in glow discharges of different gas precursors at low pressure by visible emission spectroscopy and mass spectrometry. The plasmas to analyze can be conventional luminescent lamps or glow discharges supplied by the user, or can be generated in the Cold Plasma Laboratory by means of continuous or radio-frequency discharges. A high resolution (0.02 nm typically) dispersive spectrometer, 1 m focal length, is available for emission spectroscopy in a spectral range between 300 and 800 nm. Other low resolution (1 nm), high seed portable spectrometer, is also available. It operates between 200 and 1000 nm. A quadrupole mass spectrometer with electron impact ionization, (1-100 amu range) and differential vacuum pumping (1E-5 Pa) will be used for mass spectrometry.