Ebeam Lithography: Precision ebeam lithography

Support unit: Microscopia electronica
Institute: INSTITUTO DE CIENCIA DE MATERIALES DE BARCELONA
Locality: Cerdanyola del Vallès (Barcelona)
Service's web: http://www.icmab.csic.es

Information relating to the units that offer the selected service
Support unit	Support unit Information	Selected service	Other services
Microscopia electronica ICMAB - Cerdanyola del Vallès
Servicio de Micro y Nanofabricación (MiNa) IMN-CNM - Tres Cantos

Service description

Equipment: e-LINE Plus (Raith nanofabrication). Field effect emission cathode with beam energy of 30 kVe. Equipped with traxx and periodixx technologies that allow the exposure of structures overlapping errors free, ideal for the fabrication of waveguides, resonators, photonic crystals, etc. Sample holder designed to accommodate small samples up to 4" wafers. Sample holder for 4" optical mask fabrication. Resolution : 10 nm

Options and prices chart
Options	Unit	Public Sector	Other customers
Litografía electrónica	euro / hora	96.73 €	120.23 €

Service description

Options and prices chart
Options	Unit	Public Sector	Other customers
Preparación muestra	€ / hora	12.98 €	14.22 €
Litografía electrónica	euro / hora	101.71 €	111.4 €
Litografía electrónica material resinas	euro / muestra	31.02 €	33.97 €